Lutetium-doped Cerium Oxide Sputtering Target

Catalog Number

ACMA00020694

Molecular Weight

570g/mol

Molecular Formula

CeO2 / Lu2O3

Boiling Point

2200°C(3992°F)

Melting Point

1182°C(2160°F)

Density

8.29g/mL

Appearance

Yellow to tan target

Application

high purity Lutetium Fluoride Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications.

Specification

99.9% Cerium Oxide, Lutetium Oxide-doped Sputtering Target (Lu2O3: 10%)
99.9% Cerium Oxide, Lutetium Oxide-doped Sputtering Target (Lu2O3: 20%)
99.9% Cerium Oxide, Lutetium Oxide-doped Sputtering Target (Lu2O3: 5%)

※ It should be noted that our product is only used for research, not for clinical use.