Scandium Fluoride Sputtering Target

Catalog Number

ACM13709472-2

CAS

13709-47-2

Structure

Molecular Weight

102g/mol

Molecular Formula

ScF3

Boiling Point

1,607°C(2,925°F)

Melting Point

1,552°C(2,826°F)

Density

2.52g/mL

Appearance

White

Application

high purity Scandium fluoride sputtering targets with the highest possible density High Purity (99.99%) Scandium Fluoride Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications.

Specification

99.999% 99.99% 99.9%

※ It should be noted that our product is only used for research, not for clinical use.