Yttrium Fluoride Sputtering Target

Catalog Number

ACM13709494-3

CAS

13709-49-4

Structure

Molecular Weight

146g/mol

Molecular Formula

YF3

Boiling Point

2230 °C,2503 K,4046 °F

Melting Point

1387 °C,1660 K,2529 °F

Density

4.01g/mL

Appearance

White target

Application

high purity Yttrium Fluoride Sputtering Targets with the highest possible density High Purity (99.99%) Yttrium Fluoride Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications.

Specification

99.999% 99.99% 99.9%

※ It should be noted that our product is only used for research, not for clinical use.